ultrasonic transducersfinite element analysisboundary-elements methodsmultilayersmicromachiningperiodic structures3D finite-element model3D boundary-element modelmixed finite-element-boundary-element modelperiodic ultrasound transducerslayered mediafinite-element analysisboundary-element methodperiodic transducersstratified media3D transducersmicromachined ultrasonic transducers
Ultrasonics, 2003 IEEE Symposium on
p.1654-1657
2003