Development of Hot-embossing Machines for Fabrication of Polymer Microstructures

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外文摘要：The principle of hot-embossing method for fabrication of polymer microstructures including process parameters and process control are briefly introduced。 Hot-embossing machine RYJ-Ⅰ was developed for small to medium batch production of micro components with polymer microstructures， and has already been successfully applied in fabrication of micro channels and thermal bonding of plastic (PMMA) substrate and cover of microfluidic chips at Research Center for Micro System Technology， Dalian University of Technology in China。 Hot-embossing machine RYJ-Ⅱ is newly developed， which has larger control range of temperature and pressing force， and is applicable to most polymer materials in fabrication of microstructures。 RYJ-Ⅰ and RYJ-Ⅱ are described， their design features and comparison are also given。 The developed equipment can be used in volume production and can also be used as independent equipment for research at laboratory。

外文关键词：

equipment for microfabricationhot-embossingmachine designpolymer microfluidic chippolymer microstructure

作者：

Xiaodong WANG、Dongsheng SHE、He WEI、Chong LIU

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作者单位：

Key Laboratory for Dalian University of Technology Precision & Non-traditional Machining of Ministry of Education, Dalian 116024, China

会议名称：

Proceedings of the International Conference on Mechanical Engineering and Mechanics 2005 vol.2

会议地点：

Nanjing(CN)

会议母体文献：

International Conference on Mechanical Engineering and Mechanics vol.2; 20051026-28; Nanjing(CN)

页码：

P.1383-1387

出版时间：

2005