High throughput integration of optoelectronics devices for biochip fluorescent detection

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外文摘要：Miniaturized， portable and robust sensing systems are required for the development of integrated biological analysis systems and their application to clinical diagnostics。 This work uses vertical cavity surface emitting lasers (VCSELs)， optical emission filters and PIN photodetectors to realize monolithically integrated， near infrared， fluorescence detection systems。 The integration of these micro technologies with biochip applications will drastically reduce cost and allow for parallel sensing architectures， which is particularly useful for flow channel arrays such as in capillary array electrophoresis。 This paper focuses on the fabrication of integrated fluorescence sensors。 Fabrication procedures have been developed to realize intracavity contacted VCSELs and low noise photodetectors， such as selective AlGaAs wet etching and via planarization。 A reflow process with positive photoresist has been developed to provide via electrical contacts and to optically isolate the photodetector from the light source。 Three-dimensional microstructures can be simply made by this reflow technique。 Optical simulations predict that a detection sensitivity lower than 10000 molecules per 10~4μm~2 sample area。 Single molecule detection may be possible in certain sensing architectures。

外文关键词：

biochipsfluorescencesensorsinfrared dyesVCSELssemiconductor lasersphotodetectorsfabrication

作者：

Evan Thrush、Ofer Levi、Ke Wang、James S. Harris、Stephen J. Smith

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作者单位：

Solid State and Photonics Laboratory, Stanford University

会议名称：

Microfluidics, BioMEMS, and Medical Microsystems

会议地点：

San Jose, CA(US)

会议母体文献：

Conference on Microfluidics, BioMEMS, and Medical Microsystems, Jan 27-29, 2003, San Jose, California, USA

页码：

p.162-169

出版时间：

2003