首页|SILICON SOLAR CELLS WITH BORON BACK SURFACE FIELD FORMED BY USING BORIC ACID
SILICON SOLAR CELLS WITH BORON BACK SURFACE FIELD FORMED BY USING BORIC ACID
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This paper presents a novel boron diffusion process using nontoxic boric acid solution as a boronsource to form a boron back surface field (BSF). It is shown that the boric acid provides excellent BSF quality andhigh bulk lifetimes when combined with a proper dielectric passivation. Boron emitters with a sheet resistance of~100 Ω/sq have been obtained by diffusion at 925 ℃ for 60 min. SiO_2-based dielectric passivation of the boronemitter yields J_(oe) values of ~100 fA/cm~2. The effective bulk lifetime of completed cells are measured to be > 500 μsin 1.3 Ωcm p-type FZ wafers. Cell efficiency up to 19.2 % has been achieved on 2×2cm~2 cells with the phosphorusemitter and the boron BSF formed with phosphoric acid and boric acid, respectively.
Georgia Institute of Technology, School of Electrical and Computer Engineering 777 Atlantic Drive, Atlanta, GA, 30332-0250 USA Phone: 404-894-4041, Fax: 404-894-4832, e-mail: donskim@ece.gatech.edu
Georgia Institute of Technology, School of Electrical and Computer Engineering 777 Atlantic Drive, Atlanta, GA, 30332-0250 USA
Georgia Institute of Technology, School of Electrical and Computer Engineering 777 A
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