Ultrasonic Hot Embossing and Welding of Micro Structures

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NETL

外文摘要：Ultrasonic hot embossing allows the fabrication of micro structures from polymer films by moulding from a master tool。 The fabrication process is completed within seconds and the investment costs are low。 With micro patterned tools， structured surfaces can be created on one or both sides of polymer films。 For micro whistles and micro fluidic devices such as micro mixers or flow sensors， sealed structures are created by welding a cover film on embossed structures。 Furthermore， moulded interconnection devices can be fabricated by welding polymer coated metal films onto polymers。

外文关键词：

Ultrasonic weldingUltrasonic hot embossingPolymer microstructures

作者：

K. Burlage、C. Gerhardy、W.K. Schomburg

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作者单位：

Konstruktion und Entwicklung von Mikrosystemen (KEmikro), RWTH Aachen University,Aachen, Germany

会议名称：

Workshop on micromechanics and microactuators

会议地点：

Aachen(DE)

会议母体文献：

Micromechanics and microactuators

页码：

113-123,ⅸ-ⅹ

出版时间：

2010

DOI：

10.1007/978-94-007-2721-2_11