GC-QEPAS: A Mems-Enabled Portable Trace Chemical Sensor for Safety & Security Applications

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原文链接

NETL
IEEE

外文摘要：This paper reports on a portable selective sensor for trace levels of hazardous vapors, which combines a twostage purge and trap vapor pre-concentration system, a MEMS gas-chromatographic (GC) separation column and a miniaturized quartz-enhanced photoacoustic spectroscopy (QEPAS) detector. This is the first demonstration of a miniaturized QEPAS device used as spectroscopic detector downstream of a FAST-GC separation column, demonstrating two-dimensional selectivity and enabling real-world analyses in dirty environments with response time of a few minutes. Furthermore, the integrated sensing system was specifically designed to be rugged and suitable to be deployed on unmanned robotic ground vehicles.

外文关键词：

Micromechanical devicesRobot sensing systemsTemperature sensorsDetectorsSiliconHeating systems

作者：

Sandro Mengali、Ivan Elmi、Luca Masini、Filippo Bonafé、Fabrizio Tamarri、Michele Sanmartin、Roberto Viola、Nicola Liberatore、Stefano Zampolli

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作者单位：

Consorzio CREO, L’Aquila, Italy

CNR-IMM, Bologna, Italy

会议名称：

International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII

会议地点：

Berlin(DE)

会议母体文献：

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII

页码：

1365-1368

出版时间：

2019

DOI：

10.1109/TRANSDUCERS.2019.8808377