首页|Effect of Deposition Conditions on the Properties of TCO Films

Effect of Deposition Conditions on the Properties of TCO Films

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The optical and electrical properties of indium metal oxide (IMO) films have been investigated under different deposition conditions for silicon heterojunction (SHJ) solar cell applications。 By adjusting oxygen concentration in the sputtering gas， and increasing magnetic field strength of the cathode， we observed enhancements in photoelectric properties of the IMO film。 A maximum Hall mobility of 49。1 cm<sup xmlns:mml="http://www。w3。org/1998/Math/MathML" xmlns:xlink="http://www。w3。org/1999/xlink">2</sup>/V·s was reached with optimal transmittance。 Furthermore， there was a 0。62 mA·cm<sup xmlns:mml="http://www。w3。org/1998/Math/MathML" xmlns:xlink="http://www。w3。org/1999/xlink">-2</sup> gain in short-circuit current (J<sub xmlns:mml="http://www。w3。org/1998/Math/MathML" xmlns:xlink="http://www。w3。org/1999/xlink">SC</sub>) with high performance IMO films， resulting in an increased conversion efficiency by 0。6%。

Photovoltaic cellsMagnetic fieldsSputteringCathodesOptical filmsSilicon

Yongcai He、Gangqiang Dong、Ge Cui、Haichuan Lu、Tianxiang Lan、Zhangda Shen、Wei Long、Cao Yu、Hui Yan、Jinyan Zhang、Yuanmin Li、Xixiang Xu

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The College of Materials Science and Engineering, Beijing University of Technology, Beijing, 100124, China

Chengdu R&D Center, Beijing Juntai Innovation Technology Co., Ltd., Chengdu, Sichuan, 610200, China

World Conference on Photovoltaic Energy Conversion;European Photovoltaic Solar Energy Conference;Photovoltaic Science and Engineering Conference;IEEE Photovoltaic Specialist Conference

Waikoloa Village(US)

2018 IEEE 7th World Conference on Photovoltaic Energy Conversion

2018-2020

2018

10.1109/PVSC.2018.8548040