首页|Design and Simulation of an Anti-collapse CMUT Structure
Design and Simulation of an Anti-collapse CMUT Structure
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NETL
Springer Nature
Compared with traditional piezoelectric ultrasonic transducers， CMUT (Capacitive Micro-machined Ultrasonic Transducer) has advantages of wider bandwidth， better dielectric impedance matching， easier for its arraying and higher compatibility with standard IC processes。 The CMUT made with CMOS-MEMS technology can be directly integrated with circuits。 However， the collapse of top electrode causes the device failure during the manufacturing process。 Therefore， we propose a new MEMS process which is not only self-stopping but also prevent the top electrode from collapsing。 In addition， COMSOL Multiphysics and Matlab are used in the simulations to verify the CMUT structure。
CMUTAnti-collapseSelf-stoppingMEMSCMOS
Jiajun Liu、Kaixin Li、Benxian Peng、Fengqi Yu
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Shenzhen Institutes of Advanced Technology, Chinese Academy of Science, Shenzhen, China, Guangdong Power Exchange Center Co., Ltd., Guangzhou, China
Guangdong Power Exchange Center Co., Ltd., Guangzhou, China
Shenzhen Institutes of Advanced Technology, Chinese Academy of Science, Shenzhen, China
International Conference on Communications, Signal Processing, and Systems
NETL
Springer Nature
