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Active-Matrix Micro-LED Display using MoS_2 TFTs

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The integration of transition metal chalcogenides, such as MoS_2, with Ⅲ-Ⅴ compound semiconductors has posed significant challenges in the implementation of two-dimensional materials in optoelectronics applications。 In this presentation, we propose a breakthrough method for directly growing molybdenum disulfide (MoS_2) on Ⅲ-Ⅴ compound semiconductors, compatible with a batch microfabrication process。 By synthesizing a thin film of MoS_2 on a gallium-nitride-based epitaxial wafer, we successfully developed a thin film transistor array。 In addition, we achieved seamless monolithic integration of the MoS_2 thin film transistor with micro-light-emitting-diode (micro-LED) devices, resulting in a state-of-the-art active-matrix micro-LED display。 This novel approach paves the way for promising heterogeneous integration, combining established semiconductor technology with emerging two-dimensional materials, ultimately enabling high-performance optoelectronic systems。

micro-LEDtwo-dimensional materialstransition metal chalcogenidesmolybdenum disulfide

Jong-Hyun Ahn

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School of Electrical and Electronic Engineering, Yonsei University, 50 Yonsei-ro, Seodaemun-gu, Seoul, 03722, Republic of Korea

Conference on Light-Emitting Devices, Materials, and Applications

San Francisco(US)

Light-Emitting Devices, Materials, and Applications XXVIII

129060J.1-129060J.5

2024