基于ZrO2-SiO2和介孔SiO2凝胶膜制备可见光区双层减反射膜
Preparation of double-layer visible region anti-reflective films based on ZrO2-SiO2 and mesoporous SiO2 gel films
汪文文 1肖志葳 1邓志文 1贾红宝 1王颖 1朱世海1
作者信息
- 1. 辽宁科技大学 理学院,辽宁 鞍山 114051
- 折叠
摘要
采用溶胶-凝胶法,以正丙醇锆、正硅酸四乙酯为原料,在乙醇体系中以原位混合方式成功制备ZrO2-SiO2混合溶胶,Zr摩尔分数为20%～80%.在熔融石英基底上镀制混合凝胶膜,所得ZrO2-SiO2薄膜折射率在1.55～1.75之间可调.以有序介孔SiO2薄膜为外层,选择与之匹配的ZrO2-SiO2薄膜为内层,构建λ/4～λ/2双层宽谱带减反射涂层.根据实际膜层的光学常数进行双层膜的优化设计,成功制备出在可见光区平均透射率达到99.17%的双层减反射薄膜.
Abstract
ZrO2-SiO2 hybrid sols were successfully prepared by sol-gel method using zirconium n-propanol and tetraethyl orthosilicate as precursors in ethanol solution,in which the Zr mole fraction was 20%～80%.The hybrid gel films were dip-coated on fused quartz substrates,and the refractive index values of the ZrO2-SiO2 films were adjustable between 1.55 and 1.75.With ordered mesoporous SiO2 films as the top layer,λ/4～λ/2 double-layer wide broadband anti-reflective films were constructed by selecting the matched ZrO2-SiO2 films as the bottom layer.According to the optimal design of the double-layer anti-reflective films based on op-tical constants of singl-layer films,the anti-reflective films were elaborately prepared and average trans-mittance of the films in the visible light region even reach 99.17%.
关键词
ZrO2-SiO2混合溶胶/溶胶-凝胶法/原位混合/减反射膜Key words
ZrO2-SiO2 hybrid sol/sol-gel/in situ mixing/anti-reflective film引用本文复制引用
基金项目
辽宁省教育厅项目(LJKMZ20220641)
辽宁省教育厅项目(JYTMS20230949)
辽宁科技大学实验室开放基金()
出版年
2024
NETL
NSTL
万方数据