Preparation of double-layer visible region anti-reflective films based on ZrO2-SiO2 and mesoporous SiO2 gel films
ZrO2-SiO2 hybrid sols were successfully prepared by sol-gel method using zirconium n-propanol and tetraethyl orthosilicate as precursors in ethanol solution,in which the Zr mole fraction was 20%～80%.The hybrid gel films were dip-coated on fused quartz substrates,and the refractive index values of the ZrO2-SiO2 films were adjustable between 1.55 and 1.75.With ordered mesoporous SiO2 films as the top layer,λ/4～λ/2 double-layer wide broadband anti-reflective films were constructed by selecting the matched ZrO2-SiO2 films as the bottom layer.According to the optimal design of the double-layer anti-reflective films based on op-tical constants of singl-layer films,the anti-reflective films were elaborately prepared and average trans-mittance of the films in the visible light region even reach 99.17%.
ZrO2-SiO2 hybrid solsol-gelin situ mixinganti-reflective film
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