Effect of Co-doping of N and Si on microstructure and properties of diamond-like carbon film
In order to study the synergistic effect of different doping elements on the modification of diamond-like carbon(DLC)films,DLC film co-doped with N and Si were prepared on the surface of 2024 aluminum alloy by plasma enhanced chemical vapor deposition(PECVD).The influence of different gas flow rates on the structure and properties of N/Si-DLC film and its mechanism was studied.The results show that with the increase of N2 and TMS flow ratio,the bonding strength between the film and the substrate increases gradual-ly,and the hardness and elastic modulus increase gradually.When N2 and TMS flow ratio is 30∶30,the film has the highest hardness and elastic modulus,which are 11.58 GPa and 108.4 GPa respectively.At the same time,the corrosion resistance of N/Si-DLC film first increased and then decreased with the increase of N2 and TMS flow ratio.When the N2 and TMS flow ratio is 30∶30,the film is denser,with fewer defects and excel-lent corrosion resistance.
2024 aluminum alloydiamond-like carbon filmplasma-enhanced chemical vapor depositionelement doping
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NSTL
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