Due to size reasons,current common flow rate sensors can only be inserted into pipes with larger diameters to measure liquid flow rate.To be placed into a micro pipeline,a cylindrical thermal-resistance micro-electromechanical system(MEMS)flow sensor with temperature compensation was designed and fabricated.It is composed of a heating resistor and a temperature-measuring resistor to measure the flow rate through the working principle of heat loss.The experimental results show that the temperature coefficient of resistance(TCR)is 0.2236％/℃ and the sensitivity was 4.25 mV/(cm·s-1).The designed circuits demonstrate an excellent effect of temperature compensation for accurate measuring results.The proposed flow sensor can measure the flow rate in a pipe with an inner diameter of 2 mm,and is expected to be applied to the industrial,biomedical and other fields.
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