Research on Micro-cylindrical Based MEMS Flow Rate Sensor with Temperature Compensation
Due to size reasons,current common flow rate sensors can only be inserted into pipes with larger diameters to measure liquid flow rate.To be placed into a micro pipeline,a cylindrical thermal-resistance micro-electromechanical system(MEMS)flow sensor with temperature compensation was designed and fabricated.It is composed of a heating resistor and a temperature-measuring resistor to measure the flow rate through the working principle of heat loss.The experimental results show that the temperature coefficient of resistance(TCR)is 0.2236％/℃ and the sensitivity was 4.25 mV/(cm·s-1).The designed circuits demonstrate an excellent effect of temperature compensation for accurate measuring results.The proposed flow sensor can measure the flow rate in a pipe with an inner diameter of 2 mm,and is expected to be applied to the industrial,biomedical and other fields.
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