具有温度补偿的微细圆柱基MEMS流速传感器研究
Research on Micro-cylindrical Based MEMS Flow Rate Sensor with Temperature Compensation
黄皓凯 1胡致远 1叶丰明 1杨卓青2
作者信息
- 1. 上海交通大学微米纳米加工技术全国重点实验室,上海 200240;上海交通大学电子信息与电气工程学院微纳电子系,上海 200240
- 2. 上海交通大学微米纳米加工技术全国重点实验室,上海 200240
- 折叠
摘要
目前常见的流速传感器由于尺寸原因,只能介入管径较大的管道进行液体流速测量.设计并制造了一种可介入小管径管道的、具有温度补偿功能的圆柱基流速传感器,器件采用旋转投影曝光和微机电系统(MEMS)技术制作而成,包含一个薄膜型加热电阻和一个稳定补偿电阻,基于热阻原理可实现对不同温度流体流速的精确测量.测试结果表明:该流速传感器的温度系数为0.2236％/℃,灵敏度为4.25mV/(cm·s-1).研制的圆柱基MEMS流速传感器可在内径为2 mm的管道中对具有一定温度变化的流体进行流速测量,有望应用于工业、生物医学等领域.
Abstract
Due to size reasons,current common flow rate sensors can only be inserted into pipes with larger diameters to measure liquid flow rate.To be placed into a micro pipeline,a cylindrical thermal-resistance micro-electromechanical system(MEMS)flow sensor with temperature compensation was designed and fabricated.It is composed of a heating resistor and a temperature-measuring resistor to measure the flow rate through the working principle of heat loss.The experimental results show that the temperature coefficient of resistance(TCR)is 0.2236％/℃ and the sensitivity was 4.25 mV/(cm·s-1).The designed circuits demonstrate an excellent effect of temperature compensation for accurate measuring results.The proposed flow sensor can measure the flow rate in a pipe with an inner diameter of 2 mm,and is expected to be applied to the industrial,biomedical and other fields.
关键词
微机电系统/微细圆柱基底/热阻式/温度补偿/流速传感器Key words
MEMS/micro-cylindrical substrate/thermal-resistance/temperature-compensate/flow rate sensor引用本文复制引用
出版年
2024
NETL
NSTL
万方数据