用于FBG解调的AWG芯片的设计、仿真与制备
Design,Simulation and Fabrication of AWG Chip for FBG Demodulation
李姝锋 1袁配 1黎婷 1李丙祥 1许然 1杨奕瑶 1祝连庆1
作者信息
- 1. 北京信息科技大学光电测试技术及仪器教育部重点实验室,北京 100016;北京信息科技大学光纤传感与系统北京实验室,北京 100016
- 折叠
摘要
设计、仿真并制备了一种用于光纤布拉格光栅(FBG)解调的阵列波导光栅(AWG)芯片.该芯片基于SOI衬底进行制备,并在AWG的输入/输出波导、阵列波导与平板波导之间采用双刻蚀结构进行优化.经仿真,该AWG的插入损耗为1.5 dB,串扰小于-20 dB,3 dB带宽为1.5nm.优化后的AWG芯片采用深紫外光刻技术、电感耦合等离子体等技术制备.经测试,该AWG的插入损耗为3dB,串扰小于-20dB,3dB带宽为2.3 nm.搭建了基于该AWG的解调系统,解调实验结果表明,该系统在0.8 nm范围内的解调精度可达11.26 pm,波长分辨率为6 pm.
Abstract
The miniaturized fiber Bragg grating(FBG)demodulation system is a hot research topic in the field of fiber optics sensing.The development of photonic integration technology has given rise to a series of compact FBG demodulation devices.Arrayed waveguide gratings(AWGs)serve as the core components in photonic integrated demodulation systems.Their spectral characteristics have a significant impact on the demodulation performance of photonic integrated FBG demodulation systems.In this study,we designed,simulated,and fabricated an arrayed waveguide grating(AWG)based on a silicon on insulator(SOI)substrate.Test results indicate that this AWG has an on-chip insertion loss of 3 dB,crosstalk of less than-20 dB,and a 3 dB bandwidth of 2.3 nm.We constructed a demodulation system based on this AWG,and experimental results show that the system achieves a demodulation accuracy of 34.2 pm within a 0.8 nm range,with a wavelength resolution of 6 pm.
关键词
阵列波导光栅/绝缘体上硅/光纤传感/光纤光栅解调系统/光子集成Key words
arrayed waveguide grating/silicon on insulator/fiber optic sensing/fiber optic grating demodulation system/photonic integration引用本文复制引用
基金项目
国家自然科学基金项目(62205030)
北京市教育委员会科学研究计划项目(KM202211232019)
出版年
2024
NETL
NSTL
万方数据