首页|Structural Un-uniformity and Electrical Anisotropy of μc-Si: H Films
Structural Un-uniformity and Electrical Anisotropy of μc-Si: H Films
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Structural un-uniforrnity and electrical anisotropy of μc-Si: H film are investigated in this paper.It is found that the structure of μc-Si: H film along the direction perpendicular to the substrate is not uniform,which is modulated by film thickness. In addition, there is a dark conductivity anisotropy along the direction parallel(σ//) and perpendicular(σ⊥)to the substrate in μc-Si: H film. The reasons for such an property of μc-Si: H film and the effect of oxygen contamination are analyzed.
μc-Si: H thin filmmicro-structureanisotropyelectrical property
HAN Chunlong、LI Juan
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Zhong Huan System Engineering Co., Ltd, Tianjin 300060, CHN
Institute of Photo-electronics, Nankai University, Tianjin 300071, CHN
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