维普
万方数据Key Research and Development Program of the Key R&D Project in Shaanxi Province(2021GXLH-01-20)
Open Fund Project of Key Laboratory of Optoelectronic Information Processing,Chinese Academy of sciences(OEIP-O-202001)
China Industryuniversityresearch Innovation Fund(2021ITA10006)
National Natural Science Foundation of China(62105372)
Project Pogram of Science and Technology on Microsystem Laboratory(6142804231001)