In the process of hollow cathode discharge,the space potential oscillation affects its working performance,and the high-energy ions generated in the oscillation process cause sputtering corrosion to the cathode orifice,which seriously affect the lifetime of hollow cathode. In this paper,an integrated coupling model consisting of prticle-in-cell ( PIC ) model,oscillation amplitude model and equivalent circuit model is established to calculate the potential oscillation characteristics of hollow cathode. Firstly,PIC model is used to calculate the discharge characteristics of plume plasma under the conditions of different discharge currents,discharge voltages and gas flow rates,and the spatial plasma distribution of time-averaged parameters such as plume potential,plasma number density,electric field strength and electron temperature is obtained. Secondly,based on the plasma aggregation and dissipation theory,the potential oscillation amplitude model is established,and the spatial potential oscillation amplitude is estimated according to the calculated time-averaged parameters. Finally,the plasma time-averaged parameters and potential amplitude oscillation parameters are taken as input parameters and brought into the hollow cathode discharge equivalent circuit model to obtain the potential oscillation waveform under the corresponding working conditions. By comparing with the experimental results,it is found that the integrated coupling model established in this paper can predict the plasma potential oscillation of hollow cathode plume,and the research results can be used to guide the stable discharge of hollow cathode,thus improving its service lifetime.
关键词
空心阴极/质点网格模型/电势振荡/等效电路模型/等离子体聚集与耗散
Key words
hollow cathode/prticle-in-cell model/potential oscillation/equivalent circuit model/plasma aggregation and dissipation
维普
万方数据