Effect of Deposition Pressure on Microstructure and Tribological Properties of (AlTiVCrNb)CxNy Coatings Deposited by Graphite Co-sputtering
The work aims to study the effects of different deposition pressure on the microstructure and tribological properties of magnetron sputtering (AlTiVCrNb)CxNy coatings. The (AlTiVCrNb)CxNy coating was prepared by unbalanced RF magnetron sputtering. The composition,morphology,crystal orientation structure and chemical morphology of each element were analyzed by related equipment. The hardness,elastic modulus and friction and wear properties of the coating were further characterized by nanoindentation,reciprocating sliding friction and wear tester and white light interference topography. With the increase of deposition pressure,the surface morphology of (AlTiVCrNb)CxNy coating changed from dispersed columnar to flower-shaped columnar aggregation,and the gap of coating cross-section morphology decreases first and then increased. When the deposition pressure was 0.4 Pa,the compactness of the coating was optimal. The hardness and elastic modulus of the (AlTiVCrNb)CxNy coating increased firstly and then decreased with the increase of the deposition pressure due to the change of the relative content of the carbon sp3 bond in the coating. The maximum hardness was 21.23 GPa. When the deposition pressure was 0.4 Pa and the load was 5 N,the coating formed a good carbon transfer film on the surface of the grinding ball due to sp2 clusters during the friction and wear process. The average friction coefficient and wear rate of (AlTiVCrNb)CxNy coating were the lowest,which were 0.261 and 0.69×10-6 mm3/(N·m),respectively. The change of deposition pressure has a great effect on the microstructure,mechanical properties and tribological properties of (AlTiVCrNb)CxNy coating,and (AlTiVCrNb)CxNy coating with excellent structure and friction properties can be prepared by graphite co-sputtering.
万方数据
维普
