Analysis of ITO Film Performance and Process Control Based on Drude Model
The ion-assisted electron beam evaporation technology is used to prepare ITO thin films.With reference to the"fourth paradigm"research idea,an optical model with the Drude oscillator as the core is established based on the optical properties of the thin film.Starting from the model parameters,the effect of carrier concentration and mobility is analyzed.According to the influence of optical performance,it is concluded that increasing the carrier mobility can simultaneously improve the optical and electrical properties of thin film products.Summarize and analyze the main results of literature reports,and proposed a performance improvement process plan.It was verified that the carrier mobility of the sample was increased from 6.3 cm2·V-1·s-1 to 18.3 cm2·V-1·s-1,and the thickness was reduced from 315.5 nm in the case of 155.2 nm,the surface resistance is reduced from 50.1 Ω/□ to 26.2 Ω/□.
ITO filmcarrier concentrationmobilityoptical constantsoptical model
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