Influence of Nitrogen Flow Rate on Micro structure and Properties of Titanium Nitride Coatings
Titanium nitride coatings were prepared on Ti6A14V titanium alloy via DC reactive sputtering technology at different nitrogen flow rates.The coating was characterized by scanning electron microscope(SEM),X-ray diffractometer(XRD),X-ray photoelectron spectroscopy(XPS),scratch tester,and electrochemical workstation to investigate the influence of nitrogen flow rate on the coating's microstructure and properties.Results indicate that at 0.3 mL/min nitrogen flow rate,the coating exhibits an amorphous structure,while at 0.5～3.5 mL/min,there is a titanium nitrogen oxide crystal phase.As the nitrogen flow rate increases,the N element content in the coating decreases,the O element content increases,the coating thickness decreases,and the density,interface bonding,and corrosion resistance are enhanced.
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