Homogeneity Study of Extreme Ultraviolet Multilayer Films Base on High Frequency Revolution Speed Variation Strategy
A self-developed high-vacuum magnetron sputtering coating system is applied to carry out experiments in the direction of preparing high reflectivity and high uniformity extreme ultraviolet Mo/Si multilayers. The planetary running coating method combining high speed uniform spinning and adjusting the rotational speed of the rotor is used to realize the high uniformity of the multilayer film cycle thickness under the strategy of high variable speed of the rotor. The experimen-tal results show that the uniformity of the multilayer film cycle thickness is improved by continuously adjusting the speed of the substrate swept over the target surface through the high-speed variation of the rotational speed,and the relative devia-tion of the Mo/Si multilayer film cycle thickness of 6.92 nm cycle thickness on the curved substrate is better than±0.3％ in the 150 mm diameter range. Synchrotron radiation test results show that at an incidence angle of 5°,the reflectivity of the Mo/Si multilayer film is 62.2％ at the center wavelength of 13.5 nm.
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