A kind of MEMS(Microelectromechanical system) emulational software which is based on nodal method simulation is devised with its basic structure of six modules. The detailed realization methods of the first three modules are presented, including methods for three-dimensional description of MEMS device and extraction of nodal element. With process flows and parameters, generation from layout to three-dimensional solid structure is realized and extraction of nodal element is then implemented. Some program flows and kernel algorithms of layout explanation, rectangle partition, conversion from two-dimensional layout to three-dimensional structure, nodal element compartmentalization and extraction have been illustrated detailedly. A MEMS comb-drive resonator is used for introducing related algorithms, procedures and all graphic output are correct.
国家科技期刊平台
NSTL
维普
万方数据
