With the extensive development of hydrogen(H2)source,it is necessary to detect leakage of H2.Palladium(Pd)nanoparticles are synthesized by using solvothermal method and a break-junction type hydrogen sensor is fabricated by dispersing Pd nanoparticles on the silicon-based interdigital gold(Au)electrode by using spin-coating method which is low-cost and simple.The silicon-based interdigi-tal gold(Au)electrode is prepared by using Microelectromechanical System(MEMS)technology.The sensing performance of hydrogen sensor based on hydrogen induced Pd lattice expansion effect(HILE)is studied and the results show that the H2 response of sensors in-creases with the increasement of Pd coverage on the substrate.At room temperature,this type of sensor shows a faster response speed to 500×10-6-2 500×10-6 H2,the response time is about 5 s,and the recovery time is about 25 s.The response to 2 500×10-6 H2 is as high as 83%,possessing good selectivity and stability as well.
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