首页|基于钯纳米颗粒导电沟道的室温型氢气传感器的研究

基于钯纳米颗粒导电沟道的室温型氢气传感器的研究

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随着氢能的广泛应用,检测氢气(H2)泄漏十分必要.采用溶剂热法合成钯(Pd)纳米颗粒,结合旋涂法从极大程度上简化了覆盖敏感层工艺,在利用微机电系统(MEMS)工艺制备的硅基金(Au)叉指电极上研究了基于"氢致Pd晶格膨胀效应(HILE)"的裂结式H2 传感器的敏感特性,为低成本批量化制备室温型氢气传感器提供了可行性研究.结果表明该传感器对H2 的响应值与Pd纳米颗粒在基底上的覆盖率密切相关:覆盖率在一定范围内越大,响应值越小.在室温下,该类传感器对500×10-6～2 500×10-6 H2 表现出了较快的响应速度:响应时间在5s左右,恢复时间在25s左右,具有较高的响应值:在2 500×10-6 H2 气氛下高达 83%,有较好的选择性和稳定性.
Study on Room Temperature Hydrogen Sensor Based on Conducting Channel of Palladium Nanoparticles
With the extensive development of hydrogen(H2)source,it is necessary to detect leakage of H2.Palladium(Pd)nanoparticles are synthesized by using solvothermal method and a break-junction type hydrogen sensor is fabricated by dispersing Pd nanoparticles on the silicon-based interdigital gold(Au)electrode by using spin-coating method which is low-cost and simple.The silicon-based interdigi-tal gold(Au)electrode is prepared by using Microelectromechanical System(MEMS)technology.The sensing performance of hydrogen sensor based on hydrogen induced Pd lattice expansion effect(HILE)is studied and the results show that the H2 response of sensors in-creases with the increasement of Pd coverage on the substrate.At room temperature,this type of sensor shows a faster response speed to 500×10-6-2 500×10-6 H2,the response time is about 5 s,and the recovery time is about 25 s.The response to 2 500×10-6 H2 is as high as 83%,possessing good selectivity and stability as well.

interdigital electrodehydrogen,sensorsPd nanoparticleshydrogen induced lattice expansion

涂建鑫、邹杰、孙靖远、张文冰、毕春跃、谢光忠、简家文

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宁波大学信息科学与工程学院,浙江 宁波 315211

电子科技大学光电科学与工程学院,四川 成都 610054

浙江万里学院大数据与软件工程学院,浙江 宁波 315100

叉指电极 氢气 传感器 Pd纳米颗粒 氢致晶格膨胀

国家自然科学基金项目中国博士后科学基金项目浙江省自然科学基金项目浙江省自然科学基金项目宁波市自然科学基金项目宁波市自然科学基金项目

619712512019M663474LGG22F010017LY18F0100092018A610002202003N4325

2024

10.3969/j.issn.1004-1699.2024.01.003

传感技术学报
东南大学 中国微米纳米技术学会

传感技术学报

CSTPCD北大核心
影响因子：1.276
ISSN：1004-1699
年,卷(期)：2024.37(1)
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