传感技术学报2024,Vol.37Issue(1) :22-28.DOI:10.3969/j.issn.1004-1699.2024.01.004

基于银纳米线的柔性压阻式触觉传感器研究

Research on Flexible Piezoresistive Tactile Sensor Based on Silver Nanowire

谭苗苗 刘伟
传感技术学报2024,Vol.37Issue(1) :22-28.DOI:10.3969/j.issn.1004-1699.2024.01.004

基于银纳米线的柔性压阻式触觉传感器研究

Research on Flexible Piezoresistive Tactile Sensor Based on Silver Nanowire

谭苗苗 1刘伟1
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作者信息

  • 1. 北京联合大学机器人学院机械工程系,北京 100027;北京联合大学北京市智能机械创新设计服务工程技术研究中心,北京 100027
  • 折叠

摘要

触觉传感器是智能机器人感知外界环境并与人进行交互的关键环节.多种物理测量和高延展性使触觉传感器得到了更广泛的应用.提出了一种制造工艺简单、成本低的柔性触觉传感器,根据电阻的变化,可检测温度和接触压力.该传感器是由PDMS薄膜、纸基银纳米线和PDMS薄膜组成的三明治结构.敏感元件为 3×3 的纸基银纳米线阵列,阵列末端用导电银浆引线.整个传感器的尺寸为 3 cm×3 cm.通过压力测试和温度测试实验,测量了传感器阵列交点处的电阻随着压力和温度变化趋势.结果表明,该传感器的压力检测灵敏度为 2.8 Ω/N,温度检测灵敏度为 0.18 Ω/℃.该传感器的结构和制备工艺简单可行,在机器人电子皮肤领域具有广阔的应用前景.

Abstract

Tactile sensor is the key link for intelligent robot to perceive the external environment and interact with people.Multiple physi-cal measurements and high ductility make tactile sensors more widely used.A flexible tactile sensor with simple manufacturing process and low costs is presented.Based on the change of resistance,it can detect temperature and contact pressure.A sandwich structure of the sen-sor composed of PDMS film,paper-based silver nanowires and PDMS film is designed.A 3×3 array of paper-based silver nanowires is pro-cessed,and copper wires are led out at the end of the array with conductive silver paste.The size of the whole sensor is 3 cm×3 cm.Dur-ing the experiments,the resistances at the array intersection are measured when applying pressure and changing surface temperature.Re-sults show that the pressure detection sensitivity of the sensor is 2.8 Ω/N and the temperature detection sensitivity is 0.18 Ω/℃.The structure and preparation process of sensor here are simple and feasible,holding broad promise in electronic skin of robots.

关键词

微机电系统/柔性传感器/压阻效应/银纳米线

Key words

MEMS/flexible sensor/piezoresistive/silver nanowire

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基金项目

university level scientific research project of Beijing Union University(ZK30201907)

出版年

2024
传感技术学报
东南大学 中国微米纳米技术学会

传感技术学报

CSTPCDCSCD北大核心
影响因子:1.276
ISSN:1004-1699
参考文献量22
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