用于压阻桥式传感器的非线性与温度漂移协同矫正模型
Co-Correction Model of Nonlinearity and Temperature Drift for Piezoresistive Bridge Sensors
井凯 1沈祥 2蒋昊翔 1王凤娟1
作者信息
- 1. 西安理工大学自动化与信息工程学院,陕西 西安 710048
- 2. 西安电子科技大学机电工程学院,陕西西安 710071
- 折叠
摘要
针对压阻桥式传感器输出非线性与温度漂移两种非理想因素,建立了一种模拟域度下的非线性/温度漂移协同矫正模型.该模型主要包含线性化与温度漂移矫正模型,其中线性化模型通过对输出信号的负反馈采集与平方项矫正算法,实现对片外传感器的非线性矫正;而针对实际应用中温度漂移(零位漂移与灵敏度漂移)的非理想特性,提出一种基于片上温度查找表的可重构插值算法,该算法通过温度寻址式增益补偿技术与失调消除技术,分别实现灵敏度漂移与零位漂移矫正.仿真结果表明,该模型可将压力输入范围从 0kPa至 100kPa的非线性误差降低至 0.049％FSR(FSR为满量程输出范围);在-30℃至 85℃范围内,该模型可将零位误差降低至初始的 0.092‰FSR,灵敏度误差降低至 0.034‰FSR.
Abstract
A Co-correction model is proposed for two non-ideal factors(nonlinearity and temperature drift)in piezoresistive bridge sensor.The linearity module realizes the calibration of the nonlinearity of off-chip sensors through the feedback of the output signal and the algo-rithm of"square term correction";and for the temperature drift(offset and sensitivity drift),it is proposed that a new method with reconfig-urable interpolation algorithm based on the on-chip temperature look-up table.The algorithm achieves calibration of sensitivity drift and offset through temperature-addressable gain compensation technology and offset cancellation technology,respectively.With the pressure in-put range from 0 kPa to 100 kPa,the simulation results show that the model can reduce the nonlinearity error to 0.049％FSR;with the tem-perature range from-30℃to 85℃,the model can reduce the offset to 0.092‰FSR,and the sensitivity error to 0.034‰FSR.
关键词
压阻桥式传感器/输出非线性矫正/可重构插值法Key words
piezoresistive bridge sensor/nonlinearity correction/reconfigurable interpolation algorithm引用本文复制引用
基金项目
国家自然科学基金项目(62004160)
陕西省重点研发计划(2023-YBGY-351)
西安市科技计划项目-高校院所人才服务企业项目(2023JH-GXRC-0024)
出版年
2024
国家科技期刊平台
NSTL
万方数据