MEMS风速风向传感器倾斜效应研究
Research of Tilt Effect for MEMS Wind Speed and Direction Sensors
韦杰 1王志明 1田兵 1张伟勋 1卢星宇 1李远 1罗星恒 2易真翔 2秦明2
作者信息
- 1. 南方电网数字电网研究院股份有限公司新型电力系统数字技术联合实验室,广东 广州 510663
- 2. 东南大学集成电路学院,江苏 南京 210096
- 折叠
摘要
主要针对智能电网、海上浮标等容易发生倾斜状态的应用场景,研究了微电子机械系统(MEMS)热式风速风向传感器的输出性能,并对带有空气动力学壳罩的传感器进行了有限元仿真和风场测试.测试结果表明,风向测量误差和仿真误差均较小,但风速测量误差却远大于仿真误差.进一步分析可知,其原因是传感器在封装时其外壳容易产生倾斜.为了解决这一问题,采用 3D打印技术实现一体化的封装外壳.测试结果表明,在±20°以内的倾斜状态下,优化后传感器的风速、风向测量误差分别满足±(0.3+5％v)m/s、±3°的指标要求.
Abstract
For the application situation of the easy occurrence of inclined condition of smart grid and buoys,the output of the micro-elec-tro-mechanical systems(MEMS)thermal wind sensors is studied.The MEMS thermal wind sensors with aerodynamic cover are simulated and tested under inclined condition.The experiments demonstrate that the measurement error of wind speed in the test is much larger than the simulation error while both the simualtion error and measurement error of the wind direction are small.This is caused by the tilted sensor after packaging.In order to solve this problem,an integrated package is realized by using 3D printing technology.Finally,the measurements indicate that the measurement error of the optimized sensor under inclined condition can achieve the performance of±(0.3+5％v)m/s for speed and±3° for direction,respectively.
关键词
微电子机械系统/风速风向传感器/热式/倾斜效应Key words
MEMS/wind sensor/thermal/inclined condition引用本文复制引用
基金项目
国家重点研发计划项目(2022YFB3206800)
南网数研院输电线路微气象MEMS风速风向传感技术研究项目(670000KK52220016)
出版年
2024
国家科技期刊平台
NSTL
万方数据