Research on Resonant Thermal Infrared Detector Based on Lamb Wave Resonator and Metasurface
A resonant thermal infrared detector based on AlN Lamb wave resonator and metasurface is designed. The detector detects in-frared radiation by absorbing infrared light and causing the temperature-frequency effect of the resonator. The electrode period,electrode width,AlN thickness and anchor of the resonator are optimized and the resonator with electrode period of 12 μm and 1. 2 μm is de-signed,and its working frequency is 365 MHz and 2544 MHz. The square metasurface is designed,and its infrared absorption mecha-nism and the influence of structure size on the absorption peak are studied. Dual-band tunable and the absorption rates achieving over 99.5％ at 3μm-5μm and 8μm-12μm are realized by integrating the metasurface and adjusting its size,the response time of the reso-nant thermal infrared detector is less than 0.8 ms,and the thermal noise equivalent power exceeds 10-11 Hz/μW.
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维普
