传感技术学报2024,Vol.37Issue(4) :603-611.DOI:10.3969/j.issn.1004-1699.2024.04.007

计及边缘效应的差动圆柱面电容式倾角传感器的输出特性

Output Characteristics of Tilt Sensor with Differential Cylindrical Surface Capacitor in Case of Taking Edge Effect into Account

王福谦
传感技术学报2024,Vol.37Issue(4) :603-611.DOI:10.3969/j.issn.1004-1699.2024.04.007

计及边缘效应的差动圆柱面电容式倾角传感器的输出特性

Output Characteristics of Tilt Sensor with Differential Cylindrical Surface Capacitor in Case of Taking Edge Effect into Account

王福谦1
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作者信息

  • 1. 四川西南航空职业学院机务学院,四川 成都 610400
  • 折叠

摘要

为了研究差动圆柱面电容式倾角传感器在计及边缘效应情况下的输出特性,将保角变换法、格林函数法和计算机数值模拟相结合,讨论差动圆柱面电容器中的电场,给出其电容量随倾角变化的函数式,绘制出该传感器输出特性曲线,分析影响该传感器线性度及灵敏度的因素,并指出改善该传感器输出特性的途径.

Abstract

In order to study the output characteristics of tilt sensor with differential cylindrical surface capacitor in case of taking edge effect into account,the electric field in the differential cylindrical surface capacitorby is discussed combining conformal method,Green's function method and computer numerical simulation,the functional formula of its capacitance changing with tilt angle is given,the output characteristic curve of the sensor is drawn,the factors affecting the linearity and sensitivity of the sensor are analyzed,and the ways to improve the output characteristics of the sensor are pointed out.

关键词

差动圆柱面电容器/倾角传感器/边缘效应/保角变换法/格林函数法/数值模拟/输出特性

Key words

differential cylindrical surface capacitor/tilt sensor/edge effect/conformal mapping method/green's function method/numerical simulation/output characteristics

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基金项目

四川省教育科研课题(2020)(SCJG20A275)

四川西南航空职业学院校级科研项目(2024)(XNHY-2024-01)

出版年

2024
传感技术学报
东南大学 中国微米纳米技术学会

传感技术学报

CSTPCDCSCD北大核心
影响因子:1.276
ISSN:1004-1699
参考文献量13
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