We find that effects resulted from micro/nano scale structures can regulate space charges which excite and lead to the electric field distribution featuring the flux convergence band structure. It is here referred to as the polarization band effect,which stems from the specific field induced interactions among atoms and molecules. The micro/nano electrode array structures are designed and fabricated by using the non-silicon micro/nano processing technology, forming nanoelectrode arrays-based plasma microelectromechanical systems ( NPMEMS) . The integrated NPMEMS device can be used to regulate inner energy states of matters and generate plasma based on the polarization band effect,all within a single chip-size limited local area or extending into a large volume space with the deployment of a distributed array of multiple devices. Its special physical and chemical properties can be utilized to greatly improve the efficiency of po-tential application systems or solve mechanism-level challenges in plasma-related applications of multiple fields.
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维普
