Design,Simulation and Fabrication of MEMS Wind Speed and Direction Sensor with Dual Control Mode
To solve the problem that the measurement range of MEMS thermal wind sensor chip applied in CTD mode is small,a MEMS thermal wind sensor chip applied in CTD mode/TB mode control is proposed for the first time. By changing the position of heater and temperature resistance in the sensor chip and the working state of the heater,the sensor used to achieve different working modes under low and high wind speed,so that more accurate output results can be obtained under different wind speed. Theoretical analysis and sim-ulation respectively prove that the measurement range of the sensor can reach 0-75 m/s,Using TB mode instead of CTD mode effective-ly solves the problem of saturation of sensor output under CTD mode at high wind speed. In addition,the flow sheet technology of the sensor is designed and fabricated by using MEMS technology.
万方数据
维普
