Design of MEMS Thermopile Infrared Temperature Sensor Based on Metamaterial Absorbing Structure
A MEMS thermopile infrared temperature sensor based on the metamaterial absorbing structure is proposed,which avoids the use of special filters for packaging and reduces the volume of the sensor.In terms of design,the metamaterial absorbing structure is used to selectively absorb the infrared radiation of the target under test,and then converts infrared light energy into heat.The relationships between structural parameters of the metamaterial absorbing structure and the wavelength along with absorption rate of the infrared light are studied by using the finite difference time domain method,and the size of the metamaterial absorbing structure for detecting the infrared wave-length range of human radiation is optimized.The results indicate that when the wavelength range of infrared light is between 9.5 μm-10.5μm,the infrared absorption rate of the sensor is better than 0.38,with an infrared absorption peak wavelength of 9.989 μm and a maximum absorption value of 0.997.The heat generated by the metamaterial absorbing structure is transferred to the thermopile.Through multi-physics field simulation,the temperature difference between the hot and cold ends of the thermopile is simulated to be 0.046 K,which is then converted into output voltage,thus verifying the effectiveness of the overall design.
infrared temperature sensormetamaterial absorbing structurethermopileMEMS
万方数据
维普
