Study on the Influence of Structure Parameters on Characteristic Time of td of Oxygen Measurement Chip of Closed-Cavity Oxygen Pump
To explore the influence of the structural parameters of the closed-cavity oxygen sensor on the characteristic time of td of the oxygen sensor,guide the improvement of the structure and optimize the working performance of the oxygen sensor,four kinds of pump oxygen chips with different structures are designed by using the control variable method and tested with self-made oxygen sensors.The td values at different oxygen concentrations are measured,and the curves are analyzed and compared with the derived theoretical correla-tions of characteristic time of td and oxygen partial pressure.The experimental results show that when the porous zirconia protective layer is added to the pump oxygen chip,the sealing of the cavity is improved,and td has a good linear relationship with the oxygen concentra-tion.The pump oxygen chip with cross platinum electrode has a larger contact area with oxygen,faster pump oxygen rate and smaller td value.In summary,the preferred chip structure is a pump oxygen chip with a porous zirconia protective layer and a cross-electrode.Compared with the control product,the td has a better linear correlation with the oxygen concentration,and the manufacturing cost is low,the td value is similar to the control product.
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