传感技术学报2024,Vol.37Issue(10) :1667-1673.DOI:10.3969/j.issn.1004-1699.2024.10.002

用于薄液膜厚度测量的面阵列电导传感器的设计与验证

Design and Validation of Surface Array Conductivity Sensors for Thin Liquid Film Thickness Measurement

魏欢 胡珀
传感技术学报2024,Vol.37Issue(10) :1667-1673.DOI:10.3969/j.issn.1004-1699.2024.10.002

用于薄液膜厚度测量的面阵列电导传感器的设计与验证

Design and Validation of Surface Array Conductivity Sensors for Thin Liquid Film Thickness Measurement

魏欢 1胡珀1
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作者信息

  • 1. 上海交通大学核科学与工程学院,上海 200240
  • 折叠

摘要

液膜厚度是研究降液膜展开及发展演化所需的重要参数,目前市面上主流的膜厚探头主要是基于点探测原理、无法满足液膜展开的面厚度测量需求,本研究基于降液膜厚度的范围,自主设计了基于柔性印刷电路板的电导法同轴圆环面阵列传感器.成功制造的传感器在 42 mm×57 mm面积上有 3×4 个同轴圆环探测单元,探头间距为 15 mm,实现了 0.3 mm~3 mm范围内的液膜厚度测量,测量电阻换算厚度的误差在 10%以内,能满足薄液膜的面厚度测量需求.

Abstract

Liquid film thickness is an important parameter to study the development and evolution of falling film,the current mainstream film thickness probe on the market is mainly based on the principle of point detection,and it can not satisfy the needs of surface thick-ness measurement in liquid film development.Based on the range of falling film thickness,a conductance coaxial ring array sensor IS in-dependently designed based on flexible printed circuit board.The successfully produced sensor has 3×4 coaxial ring detection units in a 42 mm×57 mm array area,the unit spacing is 15 mm,and it achieves liquid film thickness measurement in the range of 0.3 mm~3 mm with the error of measuring resistance conversion thickness within 10%,which can satisfy the needs of the surface thickness measure-ment of thin liquid film.

关键词

物理量传感器/液膜厚度测量/电导法/探点阵列/柔性印刷电路板

Key words

physical sensor/liquid film thickness measurement/conductivity method/sensors array/flexible printed circuit boards

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出版年

2024
传感技术学报
东南大学 中国微米纳米技术学会

传感技术学报

CSTPCD北大核心
影响因子:1.276
ISSN:1004-1699
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