Flexible Capacitive Pressure Sensor Based on Double-Sided Multistage Microstructure
As an important part of wearable intelligent devices,flexible sensors are widely used in human behavior monitoring,electronic skin system and so on.In order to further utilize the effect of microstructure on improving the sensitivity of flexible sensors,polydimethylsi-loxane(PDMS),carbon black(CB)and multi-wall carbon nanotubes(MWCNTs)are mixed into conductive materials,and the microstructure on the surface of sandpaper is copied as the upper and lower electrode layers of the sensor.PDMS is used to duplicate the curved bulge and sandpaper microstructure to form a double-sided microstructure dielectric layer,so as to design a flexible capacitive pres-sure sensor with double-sided multistage microstructure.The combination of the two microstructures significantly improves the performance of the sensor,with high sensitivity(1.287 5 kPa-1,<0.1 kPa),wide detection range(up to 100 kPa),fast response time(80 ms)and good repeatability stability.The results show that the sensor can play an ideal role in human behavior monitoring and other applications.
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