The measurement of infrared spectrum sensor is affected by the thermal error caused by unreasonable measuring points,and there is a problem of large measurement deviation.A thermal error compensation method for measuring point of near-infrared spectral sen-sor is proposed.According to the correlation between the thermal deformation of the near-infrared spectrum sensor and the temperature of the measuring point,the best temperature measuring point of the near-infrared spectrum sensor is determined.According to the test of par-tial F statistics,the temperature variables after fitting are added to the regression model,and the temperature variables that have no use value in the previous period are deleted.Based on this,the thermal error model of the measuring point is established.According to the constraint conditions in the thermal error model of the measuring points,each measuring point is calibrated,and artificial neural network is introduced to compensate the temperature fitting of each measuring point of the near-infrared spectrum sensor.The experimental results show that the maximum thermal error compensation value of the measuring point obtained by the proposed method is 45 μm,the compensa-tion value for the three axes(XYZ)of the lead screw is consistent with the actual value,and the error after compensation is controlled with-in 4.5 μm.It is proved that satisfactory temperature compensation results can be obtained by using the proposed method.
关键词
近红外光谱传感器/热误差/温度补偿/人工神经网络/关联性/误差模型
Key words
near infrared spectrum sensor/thermal error/temperature compensation/artificial neural network/relevance/error model
维普
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