传感器与微系统2024,Vol.43Issue(1) :12-16.DOI:10.13873/J.1000-9787(2024)01-0012-05

可磁场调控的三维自组装结构及其应用

Magnetic field controllable 3D self-assemble structure and its applications

张聪 李瑞 张亚超 陈超
传感器与微系统2024,Vol.43Issue(1) :12-16.DOI:10.13873/J.1000-9787(2024)01-0012-05

可磁场调控的三维自组装结构及其应用

Magnetic field controllable 3D self-assemble structure and its applications

张聪 1李瑞 1张亚超 1陈超2
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作者信息

  • 1. 中国科学技术大学工程科学学院,安徽合肥 230026
  • 2. 合肥工业大学材料科学与工程学院,安徽合肥 230009
  • 折叠

摘要

机械力诱导平面薄膜自组装为三维结构是一种重要的结构成型方法.本文通过飞秒激光将聚合物薄膜切割为二维图案化结构,并利用紫外光刻在二维结构上加工磁性层,随后经机械力诱导自组装为三维磁响应结构,并探讨了该方法制作的结构在仿生抓手、仿生舌头等方面的应用.仿真结果表明:通过有限元分析可精确预测二维平面结构在机械力诱导自组装后三维结构形貌.实验表明:三维结构依托其上磁性层可对外界磁场做出快速响应,实现对三维自组装结构的可逆非接触形貌调控.

Abstract

Mechanical force induced 3D self-assembly of flat films is an important structure forming method.Polymer thin film is cut into a 2D patterned structure by femtosecond laser,a magnetic layer on the 2D structure is processed by ultraviolet(UV)lithography,and then a 3 D magnetic responsive structure is induced self-assembling by mechanical force.The applications of the structures fabricated by this method in bionic grippers and bionic tongues and other fields are discussed.The simulation results show that the finite element analysis(FEA)can accurately predict the 3D structure morphology of the 2D planar structure after mechanical force-induced self-assembly.Experiments show that the 3D structure can response quickly to the external magnetic field through the magnetic layer on it,and realize the reverse non-contact morphing regulation of the 3D self-assembled structure.

关键词

磁响应/自组装/飞秒激光/紫外光刻/仿生

Key words

magnetic response/self-assembly/femtosecond laser/ultraviolet(UV)lithography/bionics

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基金项目

国家自然科学基金资助项目(61927814)

中央高校基本科研业务费项目(WK5290000001)

出版年

2024
传感器与微系统
中国电子科技集团公司第四十九研究所

传感器与微系统

CSTPCD北大核心
影响因子:0.61
ISSN:1000-9787
参考文献量17
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