Design and study of tuning fork type crystal resonator with stepped groove structure
In order to solve the problem of excessive vibration impedance of surface mounted device(SMD)type piezoelectric quartz tuning fork crystal,a Z-cut piezoelectric quartz tuning fork crystal resonator with stepped groove structure is proposed.Firstly,the mechanism of excessive impedance by combining the vibration principle with the structural asymmetry caused by the corrosion process of piezoelectric quartz crystal anisotropic materials is explained.Then,a new structure is proposed to make up for the defects of asymmetric structure caused by the corrosion process.Based on the finite element simulation calculation,the vibration distribution of the tuning fork crystal resonator is given.It is found through simulation analysis that the new structure effectively reduces the asymmetry of in-plane bending of the double-fork vibration beam of the tuning fork,the vibration characteristics of the tuning fork crystal resonator are improved,and the impedance of the device is reduced.
NETL
NSTL
万方数据
维普
