Parameters simulation of AMR sensor based on OOMMF
In order to improve the performance of anisotropic magnetoresistance(AMR)sensor,the structural parameters of permalloy sensing layer inside the sensor is optimized by simulation scheme.OOMMF software is used to simulate the hysteresis loop of film.And the properties of permalloy film with different thickness and aspect ratio are analyzed by using control variable method.Magnetic properties of the film are compared from the coercivity and hysteresis loss of the simulation results,and the theoretical analysis is carried out based on the measurement result of surface roughness of actual prepared thin film.Finally,a relatively complete permalloy film structure parameters is obtained to provide theoretical basis for the performance optimization of AMR sensor.
NETL
NSTL
万方数据
维普
