Design of high-precision grating three-dimensional displacement sensitive structure
Aiming at the problem that the current micro-displacement sensitive device is difficult to realize high-precision three-dimensional detection under miniaturization,two kinds of displacement-sensitive grating structures in and out of the surface are designed and applied to the detection of three-dimensional micro-displacement.The grating theory is described and a double-layer grating structure is designd.From the perspective of the influence of the two detection methods on the sensitivity of the micro-displacement,the changes of light intensity diffraction effciency is simulated by Gsolver,the diffraction efficiency change of the in-plane and off-plane sensitive grating is 0.115％/nm and 0.423％/nm,respectively,it can be seen that the diffraction efficiency change of the off-plane sensitive grating is four times that of the in-plane sensitive grating.Furthermore,the sensitive grating for the off-plane displacement is arranged in three-dimensional directions of the object to be measured,thereby high-precision three-dimensional displacement measurement is realized.
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NSTL
万方数据
维普
