首页|基于Al2O3陶瓷的Pt/PtRh型厚膜热电偶封装测试

基于Al2O3陶瓷的Pt/PtRh型厚膜热电偶封装测试

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设计了一种基于氧化铝(Al2O3)柱体的Pt/PtRh型厚膜热电偶.采用丝网印刷工艺完成传感器功能层的制备,这种方法工艺简单、可操作性强、成本低廉.对所制备的厚膜热电偶进行封装设计并进行测试.实验结果表明:带封装热电偶的迟滞大小为4.10%,小于无封装的7.65%,而且带封装热电偶在高温阶段与标准热电偶极其吻合,其平均塞贝克系数更接近于标准热电偶.实验结果均表明封装设计有利于膜状热电偶测试的准确性,达到了工程化需要.
Packaging and testing of Pt/PtRh type thick-film thermocouple based on Al2O3 ceramic
A Pt/PtRh type thick film thermocouple based on A1203 cylinder is designed.Functional layer of sensor is prepared by screen printing process,which is simple in process,strong in operability and low in cost.Packaging design and test of the prepared thick-film thermocouple is carried out.The experimental results show that the hysteresis of the packaged thermocouple is 4.10%,which is less than 7.65%of the unpackaged thermocouple,and the packaged thermocouple is very consistent with the standard thermocouple at high temperature,and its average Seebeck coefficient is closer to the standard thermocouple.The experimental results all show that the design of packaging is beneficial to the accuracy of the film thermocouple test and meets the needs of engineering.

Pt/PtRh thermocouplethick filmscreen printingpackaging

赵楠、刘涛、谢浩、董和磊、谭秋林

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中北大学电子测试技术重点实验室,山西太原 030051

中北大学仪器科学与动态测试教育部重点实验室,山西太原 030051

中北大学微米纳米技术研究中心,山西太原 030051

Pt/PtRh型热电偶 厚膜 丝网印刷 封装

国家重点研发计划资助项目国家自然科学基金资助项目国家自然科学基金资助项目

2018YFB2003103U183720951875534

2024

传感器与微系统
中国电子科技集团公司第四十九研究所

传感器与微系统

CSTPCD北大核心
影响因子:0.61
ISSN:1000-9787
年,卷(期):2024.43(1)
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