Research on gas sensing property of SnO2 nanofilms by Ag nanoparticles enhancing at room temperature
SnO2 nanofilms are deposited on p-Si substrates by magnetron sputtering method and Ag nanoparticles are loaded on them as sensitive materials for gas sensors.The experimental results show Ag nanoparticles improve the sensitivity of SnO2 nanofilms.The response value of SnO2 nanofilm with Ag sputtering time of 80 s and mass fraction of 6%loading to ethanol gas is 78.7%increased than that of SnO2 nanofilm without Ag nanoparticles loaded.This improvement can be attributed to the formation of heterojunction between Ag nanoparticles and SnO2 nanofilm.The effect of working voltage on the sensitivity of SnO2 nanofilm is experimentally tested.When the operating voltage is 5.5 V,the senor has the optimal response to ethanol and acetone,and the response values are 3.49 and 4.51,respectively.
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