采用射频磁控共溅射法在叉指电极上制备了ZnO/SnO2 n-n异质结复合薄膜,系统测试了其气敏特性,并分析了其气敏机理.结果表明,与ZnO薄膜和SnO2 薄膜气体传感器相比,ZnO/SnO2异质结薄膜气体传感器具有更低的工作温度、更高的灵敏度以及更快的响应和恢复速度.ZnO/SnO2 异质结薄膜气体传感器对乙醇具有较好的选择性,最低检测体积分数为1×10-6,最佳工作温度为250℃;对1×10-4 乙醇气体的灵敏度可达18.4,响应时间和恢复时间分别为10s和19 s.
Research on gas sensor based on co-sputtered ZnO/SnO2 heterojunction thin-film
ZnO/SnO2 heterojunction composite film is prepared on interdigital electrodes by radio frequency magnetron co-sputtering method.The gas-sensitive performance is tested,and gas-sensitive mechanism is analyzed.The results show that compared with ZnO film and SnO2 film-based gas sensors,the ZnO/SnO2 heterojunction composite film-based gas sensor exhibits lower working temperature,higher sensitivity,and faster response and recovery rates.The ZnO/SnO2 heterojunction composite film-based gas sensor shows good selectivity towards ethanol with a detection limit of 1×10-6 and an optimum working temperature of 250℃;the sensitivity of the gas sensor towards 1×10-4 ethanol gas is 18.4,and the response time and recovery times are 10 s and 19 s,respectively.
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