Design and simulation of high-frequency piezoelectric MEMS micromirror
The arrayed micromirror design can realize high-frequency operation of micromirror.The design scheme of hiding the driver under the hexagonal mirror surface is used to realize the preparation of the micromirror array unit and reduce the size of the micromirror.A flexible structure is introduced inside the mirror to reduce the risk of micromirror stress fracture and improve the reliability of the micromirror.The hexagonal close-packed method can achieve a fill-factor more than 90%.The designed micromirror can achieve three degrees of freedom(DoF)of tilt,deflection and piston.The operating frequency can reach more than 23000 Hz,and the deflection angle of harmonic response can reach 6.5°.Compared to traditional micromirror array,this design improves space utilization and actuation efficiency.
micro-electro-mechanical system(MEMS)piezoelectric drivemicromirror array(MMA)high frequency
万方数据
维普
