It is of great significance for public health to fast and in-situ monitoring on CO gas.Compared with traditional CO detection methods,metal-oxide-semiconductor(MOS)-based gas sensors are widely used in detection of toxic and harmful gases,due to its advantages of simple production method,easy operation,superior sensing performance,and can achieve real-time monitoring.Sensing mechanism and research status of CO gas sensor devices based on MOS materials are introduced.Combined with the research progress at home and abroad,the methods for improving the sensing performance of MOS-based CO sensors are reviewed,and the development direction of MOS-based CO gas sensors is prospected.
关键词
一氧化碳气体传感器/金属氧化物半导体/气敏性能/氧化石墨烯
Key words
CO gas sensor/metal-oxide-semiconductor(MOS)/gas sensitive performance/graphene oxide(GO)
维普
万方数据