Introducing pressure-sensitive structure into the piezoresistive layer is an effective method to improve the sensitivity of piezoresistive sensor,but the deformation of pressure-sensitive structure is difficult to observe directly in practical experiments,so the mechanism of microstructure deformation and resistance change is not clear.Therefore,the finite element simulation analysis software is used to simulate the action mechanism of different load sizes and sensitive structure on the pressure-sensitive structure of graphene-based flexible sensor,and reveal the influence of the pressure-sensitive structure on the deformation and resistance change of the sensor.The results show that the sensor with square column and cylindrical pressure-sensitive structure has small deformation degree,but the change area of resistance and stress is large,while the sensor with pyramid and semi-circular ball pressure-sensitive structure has large deformation degree,but the change area of resistance and stress is small.
关键词
柔性/压阻传感器/压敏结构/有限元分析
Key words
flexibility/piezoresistive sensor/pressure sensitive structure/finite element analysis
维普
万方数据