A high emissivity,low power consumption,high modulation rate MEMS infrared(IR)light source is developed based on MEMS design and processing technology.By introducing high reliable nano platinum-black(Pt-black)material as IR emission layer,successfully achieve an ultra-high emissivity covering wavelength range from 2 to 14 μm,and the average emissivity is up to 99.5%.The modulation depth is 100%at 10 Hz and 42% at 100 Hz.Under 5 V driving voltage,the radiation temperature of the MEMS IR emitter reaches 407℃ and the response time(T90)is 17 ms,and the modulation depth are 100% and 42% at 10 Hz and 100 Hz operating frequencies respectively.Finally,the MEMS IR light source chip is integrated into a miniature CO2 gas sensor prototype by experimental verification,and the results show that the component has good radiation characteristics and temperature characteristics.This MEMS IR light source can be used for both conventional CO2 and CH4 gas detection and other industrial gas detections,e.g.SO2,H2S,SF6,NH3.
关键词
微机电系统/微型红外光源/红外气体传感器/微机电系统红外光源
Key words
MEMS/miniature infrared(IR)light source/IR gas sensor/MEMS IR light source
维普
万方数据