Research on MEMS infrared light source based on nano Pt-black material with ultra-high emissivity
A high emissivity,low power consumption,high modulation rate MEMS infrared(IR)light source is developed based on MEMS design and processing technology.By introducing high reliable nano platinum-black(Pt-black)material as IR emission layer,successfully achieve an ultra-high emissivity covering wavelength range from 2 to 14 μm,and the average emissivity is up to 99.5%.The modulation depth is 100%at 10 Hz and 42% at 100 Hz.Under 5 V driving voltage,the radiation temperature of the MEMS IR emitter reaches 407℃ and the response time(T90)is 17 ms,and the modulation depth are 100% and 42% at 10 Hz and 100 Hz operating frequencies respectively.Finally,the MEMS IR light source chip is integrated into a miniature CO2 gas sensor prototype by experimental verification,and the results show that the component has good radiation characteristics and temperature characteristics.This MEMS IR light source can be used for both conventional CO2 and CH4 gas detection and other industrial gas detections,e.g.SO2,H2S,SF6,NH3.
MEMSminiature infrared(IR)light sourceIR gas sensorMEMS IR light source
万方数据
维普
