The photoelectric detection system of atomic force microscope(AFM)is designed and realized by light deflection principle,and the influencing factors of light deflection noise are studied.A new type of spiral nested structure is designed to adjust the collimating spot,which reduces the laser divergence angle to 0.053°.A high-precision three-dimensional(3D)adjustment structure is designed by using the characteristics of piezoelectric ceramics,which can precisely adjust the deflection angle in the α,β,and γ directions.The focusing focal length of 36 mm meets the design goals of miniaturization and integration.Based on the design of the high-sensitivity photoelectric detection system,the AFM system obtains a clear step structure on the surface of silicon material,and the system resolution reaches 0.1 nm,which lays an experimental foundation for future subatomic measurements.
关键词
原子力显微镜/光偏转/准直调节/压电陶瓷
Key words
atomic force microscope(AFM)/light deflection/collimation adjustment/piezoelectric ceramics
维普
万方数据