Macro and micro vision unit for complicated microassembly
Aiming at the problem that it is difficult to balance high resolution and wide view field in complicated microassemply,a macro and micro vision unit is developed based on the principle of infinitely distant imaging,in which the imaging of double optical paths is realized by the combination of two tube lenses with a single objective lens.The imaging quality of macro and micro vision unit is evaluated and precision test.Test results show while ensuring the working distance and field of vision,the measurement precision of macro and micro vision is prior to 0.5 μm and the precision of motion positioning is prior to 2 μm.At last,the experimental platform for microassembly is built up with the developed macro and micro vision unit.With this platform,the alignment connection between detection fiber and a micro channel in a microfluidic chip is realized,through the two-step operation of attitude adjustment under macro imaging and position alignment under micro imaging.It shows that the developed macro and micro vision unit can be utilized for these complex microassembly vision guidance tasks that require both the high resolution and the wide field.
万方数据
维普
