首页|基于牺牲层工艺的CMUT阵列设计制造及性能表征

基于牺牲层工艺的CMUT阵列设计制造及性能表征

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电容式微机械超声换能器(CMUT)具备比压电式超声换能器微型化、高密度阵元集成、高机电耦合系数等优势,在医学成像、流量测量等领域展现出巨大的潜力.本文基于牺牲层释放工艺,设计并成功制造了高密度集成的微型CMUT阵元,在水中对其进行了性能测试和表征.实验结果显示,该换能器具有优异的发射线性度(非线性度为0.74%),以及良好的发射和接收灵敏度.此外,轴向声压衰减趋势符合负指数衰减规律,并且具备出色的指向性能(-6dB主瓣宽度为26°),同时旁瓣干扰极小.
Design,manufacture and performance characterization of CMUT array based on sacrificial layer process
Capacitive micromachined ultrasonic transducer(CMUT)has the advantages of miniaturization,high density array integration and high electromechanical coupling coefficient compared with piezoelectric ultrasonic transducer,which shows great potential in medical imaging,flow measurement.Based on the sacrificial layer release process,a high density integrated micro CMUT array is designed and successfully manufactured.The performance of the CMUT array is tested and characterized in water.The experimental results show that the transducer has excellent transmitting linearity(nonlinear degree is 0.74%)and good transmitting and receiving sensitivity.In addition,the axial sound pressure attenuation trend follows the negative exponential attenuation rule and has excellent directional performance(-6 dB main lobe width of 26°)with minimal sidelobe interference.

capacitive micromachined ultrasonic transducer(CMUT)sacrificial layer release technologylinearitytransmitting sensitivitydirectivity

梁永、孟繁胜、王任鑫、张国军、贾利成、张文栋

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中北大学仪器与电子学院省部共建动态测试技术国家重点实验室,山西太原 030051

电容式微机械超声换能器 牺牲层释放工艺 线性度 发射灵敏度 指向性

国家基金委重大科研仪器研制项目中国博士后科学基金资助项目山西省青年科学基金资助项目

619278072023M733277202203021222025

2024

10.13873/J.1000-9787(2024)03-0108-04

传感器与微系统
中国电子科技集团公司第四十九研究所

传感器与微系统

CSTPCD北大核心
影响因子：0.61
ISSN：1000-9787
年,卷(期)：2024.43(3)
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