As an important branch of thin film pressure sensor,piezoresistive thin film pressure sensor has the advantages of high sensitivity,fast response and good elasticity,it is the challenge to achieve high sensitivity,wide working range,fast response and fast rebound at the same time in the future,and new materials,structural design,sensor preparation methods and dynamic characteristics modeling are the key for high resilience sensors.The design of substrate and active layer materials and their corresponding single microstructures,bionic structures and wrinkle structures is summarized,and the preparation technology of thin films is elaborated,the dynamic modeling and dynamic compensation method of thin film pressure sensor are summarized.Finally,new demand for development of thin film pressure sensor is prospected.
维普
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