To solve the problem of non-contact excitation of MEMS microstructures,a non-contact excitation method based on focused shock waves using is proposed.The fundamental principle of this method is using high-voltage capacitive air discharge to generate shock waves,then focus these shock waves through a hemispherical chamber so as to achieve non-contact excitation of the microstructures.A testing system for dynamic characteristics of microstructures is built up based on this approach.Experiments are performed on the dynamic characteristics of rectangular equal-section and T-shaped single-crystal silicon microcantilevers.The first-order damped natural frequencies and damping ratios of the two microcantilevers are obtained.The experimental results show that the first-order undamped natural frequency of the rectangular equal-section and single-crystal silicon microcantilever are 5 912 Hz and 2 150 Hz,respectively.Effectiveness of this method based on focused shock wave non-contact excitation in MEMS microstructures exciting is verified by dynamic testing experiments.
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